Proposing methods to reduce particle contamination
Vapor and sputter deposition results in adsorption not only at the target
but also on masks and shields in equipment.
The risk of detachment of the film increases as the thickness of the adsorbed film increases,
and the detached pieces are called particles.
The PG (particle getter) sheet is a specially processed copper film designed to reduce detachment of films that adsorbed in the equipment. The surface state, unique to particle getters, excels in relaxing stress in the adsorbed film, thereby suppressing detachment and formation of particles.
After PG installation
Comparison of erosion area
Comparison of the surface after deposition
We suggest the most appropriate thickness and form of the PG sheet based on the adsorbing material, form of the equipment, and the necessary strength and elongation that changes with temperature.
140μ Softening, Emboss
From sheet formation and die cutting to installation
We can provide PGs to meet your specific application. For example, PGs can be attached to parts inside equipment (spot welding, screw clamping, wire clamping, bending, and double-sided tape) or provided as die-cut sheets or rolled sheets.