Proposing methods to reduce particle contamination

Vapor and sputter deposition results in adsorption not only at the target
but also on masks and shields in equipment.

The risk of detachment of the film increases as the thickness of the adsorbed film increases,
and the detached pieces are called particles.

The PG (particle getter) sheet is a specially processed copper film designed to reduce detachment of films that adsorbed in the equipment. The surface state, unique to particle getters, excels in relaxing stress in the adsorbed film, thereby suppressing detachment and formation of particles.

 
NO PG

NO PG

After PG installation後

After PG installation

 

Comparison of erosion area

 
Before deposition

Before deposition

After deposition

After deposition

 


Comparison of the surface after deposition

 

PG Sheet

We suggest the most appropriate thickness and form of the PG sheet based on the adsorbing material, form of the equipment, and the necessary strength and elongation that changes with temperature.


70μ エンボス

70μ Emboss

t = 0.22mm
140μ 軟化エンボス

140μ Softening, Emboss

t = 0.57mm
210μ フラット

210μ Flat

t = 0.22mm
210μ エンボス

210μ Emboss

t = 0.85mm

From sheet formation and die cutting to installation

We can provide PGs to meet your specific application. For example, PGs can be attached to parts inside equipment (spot welding, screw clamping, wire clamping, bending, and double-sided tape) or provided as die-cut sheets or rolled sheets.


Example: spot welding

Example: spot welding

Example: spot welding

Example: spot welding

Example: spot welding

Example: spot welding

Example: spot welding

Example: spot welding

Example: screw clamping

Example: screw clamping

Example: double-sided tape

Example: double-sided tape

Sheet

Sheet

Die-cut sheet

Die-cut sheet

 
PGGuide

Fighting particle contamination with the Particle Getter.
You can download a detailed PDF brochure.