We can design full equipment systems with our long-term experience, expertise, and latest technology such as 3D CAD, thermal analysis, and structural analysis.

AutoCAD Mechanical

AutoCAD Mechanical is deployed as the main 2D CAD system allowing for efficient design even in large projects.

SolidWorks Standard

SolidWorks Standard is used for 3D CAD to examine 3D designs.

SolidWorks Premium

Structural analysis is carried out, which includes motion simulation and performance testing under loads based on real-world physical conditions.


Simulation with CAD is used for structural and heat analysis.


Thermal analysis

Thermal fluid analysis


Complex fluid dynamics can be solved using SolidWorks Flow Simulation. Thermal fluid analysis including analysis of fluids, thermal conductivity, and forces of fluids are performed.


Our rich processing experience of metals with sintered crystals, accumulation of real data from various analytical equipment and methodologies, and insight from both analog and digital viewpoints are applied to the design and fabrication processes.


Elemental analysis and morphology observation of micro-regions on a surface is performed using a scanning electron microscope (SEM) and an X-ray microanalyzer (EDX/WDX). SEM+EDX

X‐ray fluorescence analysis(XRF)

Qualitative analysis to measure constituent elements and quantitative analysis to measure concentrations of elements based on the strength of fluorescent X-rays are used to aid in design and examination.

Thermogravimetry and differential thermal analysis

Properties, including changes in mass with temperature, are compared and measured in the sample and a reference material (α-alumina, for instance) to analyze chemical and physical changes in the sample.

3D form measurement

The form of an actual part is measured to obtain data and drawings if there are no diagrams available for the part to be fabricated.

X-ray diffraction (XRD)

Diffracted X-rays that reflect when irradiated on the surface of a material are measured. Measurement of diffracted X-rays provides information on the properties and crystal structure of materials.

Thermomechanical analysis (TMA)

Mechanical changes in dimensions, such as expansion and contraction from heating and cooling of the sample, are detected and measured using a differential transformer. Bending is possible.

Bending is possible.

An armoring heater is under development.

Design and fabrication of heaters and reflectors

Total heat quantity and necessary power are calculated based on desired specifications (form of chamber, soaking zone dimensions, heating temperature, heat-up time, mass, specific heat, and degree of vacuum) and used in the design and fabrication of heater and reflector parts.

Plate heater

This heater has a wide heating area and good soaking properties. Design and fabrication are possible in various forms, thus are widely adopted.

Rod heater

This heater for intermediate size furnaces uses rods with a diameter of 3 mm to 12 mm.

Wire heater

This heater uses bound or stranded wire with a diameter of 0.2 mm to 2.3 mm and can be used in extremely large heaters.

Mesh heater

This heater uses coils of wire with a diameter of 0.6 mm to 1.2 mm. The maximum temperature is 2500°C for W and 1600°C for Mo.

Heat treatment, surface treatment, and cleaning

Appropriate cleaning and process control are carried out to address each requirement and application. Processes include chemical processing (acid, alkali, and solvent), heat treatment, plating, electropolishing, blasting, and washing with pure or ultrapure water.


Heat treatment

Heat treatment, for instance using a quartz tube hydrogen reduction furnace, can be carried out to remove oxide film and to stabilize crystals of metal.

Ultrapure water cleaning

Cleaning with pure or ultrapure water can be performed in a clean room.

  Mo heater:1400°C

Applicable fields

We have a track record of parts fabrication, design, implementation, and assembly of diverse high-temperature vacuum furnaces.

HIP furnace

Vacuum blazing furnace

Vacuum ceramic baking furnace

SIC vacuum furnace

Ta capacitor baking furnace

Furnace for growing sapphire

Vacuum heat treatment furnace

Vacuum baking furnace

Please feel free to ask us anything about hot zone structures from questions regarding the furnace itself to design, improvement, fabrication, and implementation of heaters and reflectors.