Supporting operation of deposition equipment and vacuum devices

We provide comprehensive support for various deposition equipment and vacuum devices for semiconductor, liquid crystal, media, optics, and other applications. We repair, update, and fabricate consumable parts, provide sputtering targets and materials for vapor deposition, propose methods to reduce particle contamination, and much more.

Parts fabrication

We provide metal and ceramics parts for vacuum devices and equipment by applying our advanced vacuum technology.


Special boat

Hearth liner

Hearth deck cover

Filament

 

Planetary dome

Parts for sputtering equipment

 
 

Sputtering targets and materials for vapor deposition

We provide sputtering targets and materials for vapor deposition according to your material, purity, and shape requirements.


Sputtering target

Material for vapor deposition

 

Particle contamination reduction

We offer particle contamination reduction methods with our propriety Particle Getter (PG) sheets.

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Yield improvement

Reduction of parts replacement frequency

Decreased downtime

Cost savings


Our customers’ voices

Benefits of PG implementation (examples)

 

“The semiconductor product yield increased.”

“There was too much dust during bias sputtering that ruined the process, but this is a thing of the past.”

“There is less need for blast processing to the shield, and the product lifetime became longer.”

“Improvement in the rare metal recovery is an additional benefit.”